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MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 7

Tham khảo tài liệu 'mems and microstructures in aerospace applications - robert osiander et al (eds) part 7', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 144 MEMS and Microstructures in Aerospace Applications 19. Hill E.W. et al. Giant magnetoresistive magnetometer Sensors and Actuators A Physical 59 1-3 30 1997. 20. Yee J.K. Yang H.H. and Judy J.W. Dynamic response and shock resistance of ferromagnetic micromechanical magnetometers Proceedings of the 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 308 2002. 21. Latorre L. et al. Micromachined CMOS magnetic field sensor with ferromagnetic actuation Proceedings of SPIE 4019 398 2000. 22. Beroulle V. et al. Micromachined CMOS magnetic field sensors with low-noise signal conditioning Proceedings of the IEEE Micro Electro Mechanical Systems MEMS 2002 256 2o02. 23. Kistenmacher T.J. et al. Design and properties of a thin-film MEMS-based magnetostrictive magnetometer Materials Research Society Symposium Proceedings 444 75 1997. 24. Givens R.B. et al. High sensitivity wide dynamic range magnetometer designed on a xylophone resonator Applied Physics Letters 69 18 2755 1996. 25. Vasquez D.J. and Judy J.W. Zero-power magnetometers with remote optical interrogation Proceedings of the 17th IEEE International Conference on Micro Electro Mechanical Systems MEMS 109 2004. 26. Miller L.M. et al. M-magnetometer based on electron tunneling Proceedings of the 9th IEEE Micro Electro Mechanical Systems MEMS Workshop 467 1996. 27. Tejada F. et al. Surface micromachining in silicon on sapphire CMOS technology Proceedings IEEE International Symposium on Circuits and Systems 4 2004. 28. Givens R.B. et al. Heterodyne detection of alternating magnetic fields with a resonating xylophone bar magnetometer Applied Physics Letters 74 10 1472 1999. 29. Mott D.B. et al. Micromachined tunable Fabry-Perot filters for infrared astronomy Proceedings of SPIE 4841 578 2002. 30. Sinclair M.B. et al. A MEMS-based correlation radiometer Proceedings ofSPIE 5346 37 2004. 31. Li M.J. et al. Fabrication of microshutter arrays for space application Proceedings of SPIE 4407 295 2001. .