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Ericson, E.; et. al “Mechanical Properties of Materials in Microstructure.” Handbook of Micro/Nanotribology. Ed. Bharat Bhushan Boca Raton: CRC Press LLC, 1999 © 1999 by CRC Press LLC Mechanical Properties of Materials in Microstructure Technology Fredric Ericson and Jan-Åke Schweitz 15.1 Introduction 15.2 Cohesion and Crystal Structures System Energy and Interatomic Binding • Lattice Structures and Structural Defects 15 15.3 Elasticity Properties Isotropic Elasticity • Anisotropic Elasticity 15.4 Internal Stresses Thermal Film Stress • Intrinsic Film Stress • Substrate and Interface Stresses 15.5 Plasticity and Thermomechanical Properties Elastic–Ductile Response • Time-Dependent Effects 15.6 Fracture Properties Fracture Limit and Fracture Toughness • Some Fracture Data • Fracture Initiation • Weibull Statistics • Fatigue 15.7 Adhesive Properties. | IEricson 1. el. al Mechanical Properties of Materials in Microstructure. Handbook of Micro Nanotribology. Ed. Bharat Bhushan Boca Raton CRC Press LLC 1999 1999 by CRC Press LLC 15 Mechanical Properties of Materials in Microstructure Technology Fredric Ericson and Jan-Ake Schweitz 15.1 Introduction 15.2 Cohesion and Crystal Structures System Energy and Interatomic Binding Lattice Structures and Structural Defects 15.3 Elasticity Properties Isotropic Elasticity Anisotropic Elasticity 15.4 Internal Stresses Thermal Film Stress Intrinsic Film Stress Substrate and Interface Stresses 15.5 Plasticity and Thermomechanical Properties Elastic-Ductile Response Time-Dependent Effects 15.6 Fracture Properties Fracture Limit and Fracture Toughness Some Fracture Data Fracture Initiation Weibull Statistics Fatigue 15.7 Adhesive Properties and Influence of Coatings Adhesion Influence of Coatings 15.8 Testing General Test Structures and Testing Methods Elasticity Testing by Static Techniques Elasticity Testing by Dynamic Techniques Testing of Other Properties 15.9 Modeling and Error Analysis Single-Layer Beam Two-Layer Beam Resonant Beam Micro vs. Bulk Results 15.10 Summary and Conclusions References 15.1 Introduction Mechanical properties are of critical importance to any material that is used for transmission of forces or moments or just for sustaining loads. The gradual introduction of microcomponents in practical 1999 by CRC Press LLC applications within microstructure technology MST has instigated an increasing demand for insight into the fundamental factors that determine the mechanical integrity of such elements for instance their long-term reliability or how to choose proper safety limits in design and use. The mechanical integrity of a microsystem is not only of importance in mechanical applications. It is not unusual that mechanical or thermomechanical integrity is a prerequisite for reliable performance of microsystems with primarily nonmechanical functions e.g. electric