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An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 2

Tham khảo tài liệu 'an introduction to mems engineering - nadim maluf and kirt williams part 2', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | xx Preface to First Edition Chapter 4 The Gearbox Commercial MEM Structures and Systems. This chapter includes descriptions of a select list of commercially available micromachined sensors and actuators. The discussion includes the basic principle of operation and a corresponding fabrication process for each device. Among the devices are pressure and inertial sensors a microphone a gas sensor valves an infrared imager and a projection display system. Chapter 5 The New Gearbox A Peek into the Future. The discussion in this chapter centers on devices and systems still under development but with significant potential for the future. These include biochemical and genetic analysis systems high-frequency components display elements pumps and optical switches. Chapter 6 The Box Packaging for MEMS. The diverse packaging requirements for MEMS are reviewed in this chapter. The basic techniques of packaging sensors and actuators are also introduced. A few nonproprietary packaging solutions are described. The writing of a book usually relies on the support and encouragement of colleagues friends and family members. This book is no exception. I am grateful to Al Pisano for his general support and for recognizing the value of an introductory book on MEMS. I would like to thank Greg Kovacs Kirt Williams and Denise Salles for reading the manuscript and providing valuable feedback. They left an indelible mark of friendship on the pages of the book. I am thankful to many others for their comments words of encouragement and contributions. To Bert van Drieenhuizen Dominik Jaeggi Bonnie Gray Jitendra Mohan John Pendergrass Dale Gee Tony Flannery Dave Borkholder Sandy Plewa Andy McQuarrie Luis Mejia Stefani Yee Viki Williams and the staff at NovaSensor I say Thank you Jerry Gist s artistic talents proved important in designing the book cover. For those I inadvertently forgot to mention please forgive me. I am also grateful to DARPA for providing partial funding under contract .