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Effect of substrate bias on thicknesses and hardness of TiN film created by arc technology

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This study is aimed to investigate the influence of substrate bias on thicknesses and hardness mechanical properties of arc deposition technology TiN coating which is prepared on the surface of SKD61 alloy and Silic. The thicknesses of coatings were detected by examining the cross-sectional optical microscope image base on Silic sample. |

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