Tham khảo tài liệu 'micro electro mechanical system design - james j. allen part 2', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | Introduction 9 TABLE MEMS Applications Device Pressure sensors Accelerometer Gyroscope Optical displays RF devices Robotics Biology and medicine Use Automotive medical industrial Automotive and industrial motion sensing Automotive and industrial motion sensing Cinema and business projectors home theater television Switches variable capacitors filters Sensing actuation Chemical analysis DNA sequencing drug delivery implantable prosthetics The automotive market is a mass market in which MEMS is playing an ever increasing role. For example 90 million air bag accelerometers and 30 million manifold absolute pressure sensors were supplied to the automotive market in 2002 30 . Another mass market in which MEMS has an increasing impact is the biological medical market. MEMS technology enables the production of a device of the same scale as biological material. Figure shows a comparison of a MEMS device and biological material. An example of MEMS impact on the medical market is the DNA sequencing chip GeneChip developed by Affymetrix Inc. 31 which allows medical testing in a fraction of the time and cost previously available. In addition MEMS facilitates direct interaction at the cellular level 32 . Figure shows cells in solution flowing through the cellular manipulator which could disrupt the cell membrane to allow easier insertion of genetic and chemical materials. Also shown in Figure are chemical entry and extraction ports that allow the injection of genetic material proteins etc. for processing in FIGURE MEMS device and biological material comparison. Courtesy of Sandia National Laboratories. 2005 by Taylor Francis Group LLC 10 Micro Electro Mechanical System Design FIGURE Red blood cells flowing through a cellular manipulator with chemical entry extraction ports. Courtesy of Sandia National Laboratories. a continuous fluid flow system. An additional illustration of the impact of MEMS that would have been thought to be science fiction a few .
